کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7120163 1461460 2018 13 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Comprehensive study to evaluate the lifespan of flexible polishing pads by 3D surface characterization technique
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
Comprehensive study to evaluate the lifespan of flexible polishing pads by 3D surface characterization technique
چکیده انگلیسی
The topography of a polishing pad plays a significant role to maintain the effectiveness of the finishing process and to preserve the work surface integrity. 3D surface characterization is an efficient tool to reveal the micro-geometry of the pad. A sequential finishing operation of WC-Co coating is performed by shape adaptive grinding (SAG), and chemical assisted SAG (CA-SAG) using zirconia-alumina polishing pads with mean particle sizes of 125 µm, 80 µm and 60 µm. Coherence correlation interferometry (CCI) is employed to investigate the topography of the polishing pads and to assess the microscopic wear and the lifespan of the pads. A new criterion for selecting the optimum sampling interval is proposed to ascertain the peak density precisely. A comprehensive study is undertaken to quantify and analyse the abrasive wear of the polishing pads after both SAG and CA-SAG by employing 13 advanced 3D surface texture parameters. The density and sharpness of the abrasive particles, the coarseness of the polishing pad, the area and volume of the individual motifs and the bearing and fluid retention properties of the pads are characterized. In the case of CA-SAG, the chemical reagent attacks the backing material of the pads and reduces its effective lifespan as compared to SAG.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Measurement - Volume 127, October 2018, Pages 29-41
نویسندگان
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