DEVELOPMENT AND CONTROL OF A VERSATILE NANOHANDLING ROBOT CELL

Current research work on the development of a nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two microrobots cooperate in the vacuum chamber of an SEM. One microrobot is used as manipulator and a second one is used as sample holder. The task to be carried out is gripping of carbon nanotubes (CNT). In order to enable automatic gripping an automation strategy is introduced. One key challenge for a successful automation is the continuous pose estimation of the gripper and the CNT. Therefore, algorithms for real-time processing of noisy SEM images have been implemented and tested.