کد مقاله کد نشریه سال انتشار مقاله انگلیسی ترجمه فارسی نسخه تمام متن
7131367 1461683 2018 9 صفحه PDF سفارش دهید دانلود کنید
عنوان انگلیسی مقاله ISI
High-precision spherical subaperture stitching interferometry based on digital holography
ترجمه فارسی عنوان
با توجه به هولوگرام دیجیتال، بین دو سنجنده دو طرفه کروی فوق العاده دقیق قرار می گیرد
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
چکیده انگلیسی
A novel subaperture stitching interferometry is proposed to measure the high-numerical-aperture sphericity for workshop testing, which combined digital holographic technology, subaperture stitching algorithm and systemic aberration calibration. Each subaperture is fleetly measured by the digital off-axis holography with a single shot so that the influence of measurement environment can be effectively reduced. The high-precision full aperture shape is obtained by stitching these subapertures, meanwhile, the subaperture alignment errors and the systemic aberration can be correctly compensated by the method of least-squares with the Zernike polynomial fitting. The approach is verified by testing three spherical surfaces, including a concave sphere, a convex sphere, and a hemisphere, in general environment. Moreover, the measurement results are compared with full aperture results by using a large aperture interferometer of Zygo and stitching result by using a subaperture stitching interferometer of QED. The results based on the proposed approach are consistent with the commercial interferometers. Specifically, the relative deviations of RMS are 0.009 λ and 0.02 λ for testing a concave and a convex spheres, and that is 0.011 λ for testing a hemisphere. Our method not only has the comparable measurement accuracy with the commercial interferometers but also is more robust, feasibility and inexpensive than other subaperture stitching interferometry. We provide an anti-interference way to test spherical surfaces in workshop environment.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 110, November 2018, Pages 132-140
نویسندگان
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