Force-frequency characteristics of multi-electrode quartz crystal resonator cluster

The quartz resonator has a significant force-sensitive effect under the action of force. It is most commonly used in the field of modern digital measurement and control. To reduce temperature and other interference factors as well as improve force-sensitivity, a stress distribution is derived and calculated in the quartz wafer by radial force under the elastic mechanics method. A multi-electrode force-sensitive resonator cluster is designed based on the stress distribution results. The experimental results show that the sensitivity of the quartz resonator cluster is better than the traditional single electrode resonator and that the overall force-frequency coefficient of the force-frequency reaches 10,167 Hz/N. The quartz resonator cluster is a viable sensitive element for high-precision digital inertial sensors and related detection systems.