کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7135291 1461862 2016 12 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Magnetostrictive type inductive sensing pressure sensor
ترجمه فارسی عنوان
سنسور فشار سنج حسگر القایی نوع مغناطیس سنجی
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی
This study presents a magnetostrictive type inductive sensing pressure sensor which consisted of a planar coil, CoFeB magnetic films, and a Si diaphragm. As the Si diaphragm deformed by a pressure load, the inverse-magnetostriction effect would cause permeability changes of the CoFeB magnetic films. Thus, the permeability changes as well as the pressure load can be detected by the inductance change of a planar inductor. To demonstrate the feasibility of the proposed pressure sensor, the planar inductor designs of different coil turns and in-plane patterns of magnetic films are fabricated and tested. Preliminary measurements show that the pressure sensors with 6 and 12 coil turns have sensitivities of 0.079 %/kPa and 0.064 %/kPa, respectively. In addition, based on the in-plane pattern design of the magnetic films, the gauge factor could be tuned from 55 to 852.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 238, 1 February 2016, Pages 25-36
نویسندگان
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