کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7135291 | 1461862 | 2016 | 12 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Magnetostrictive type inductive sensing pressure sensor
ترجمه فارسی عنوان
سنسور فشار سنج حسگر القایی نوع مغناطیس سنجی
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
This study presents a magnetostrictive type inductive sensing pressure sensor which consisted of a planar coil, CoFeB magnetic films, and a Si diaphragm. As the Si diaphragm deformed by a pressure load, the inverse-magnetostriction effect would cause permeability changes of the CoFeB magnetic films. Thus, the permeability changes as well as the pressure load can be detected by the inductance change of a planar inductor. To demonstrate the feasibility of the proposed pressure sensor, the planar inductor designs of different coil turns and in-plane patterns of magnetic films are fabricated and tested. Preliminary measurements show that the pressure sensors with 6 and 12 coil turns have sensitivities of 0.079 %/kPa and 0.064 %/kPa, respectively. In addition, based on the in-plane pattern design of the magnetic films, the gauge factor could be tuned from 55 to 852.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 238, 1 February 2016, Pages 25-36
Journal: Sensors and Actuators A: Physical - Volume 238, 1 February 2016, Pages 25-36
نویسندگان
Heng-Chung Chang, Sheng-Chieh Liao, Hsieh-Shen Hsieh, Jung-Hung Wen, Chih-Huang Lai, Weileun Fang,