کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7136259 | 1461877 | 2015 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy
ترجمه فارسی عنوان
ژنراتور پلاسما برای سرمایش با دمای پایین برای طیف سنجی گاز فشار اتمسفری
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
Accurate and reliable measurements of gas composition are very important in science and industry applications. One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work, we propose integrated microcell for optical measurements of gas discharge at atmospheric pressure. This device is fabricated using Low Temperature Co-fired Ceramics (LTCC) technology. Investigated gas is excited in buried air-cavity, placed between two electrodes. Discharge is created using high alternating voltage (30Â kV). Optical signal is then transmitted through an integrated optical fibre to the miniature spectrometer. Because different gases have different emission lines, plot of light intensity vs. wavelength provides information about molecular composition of the investigated gas sample. In this work, design, fabrication and performance of the LTCC-based gas discharge chamber is presented. Spectral measurements are performed for air, argon and nitrogen. Moreover, influence of gas flow rate on obtained emission spectrum is discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 223, 1 March 2015, Pages 174-179
Journal: Sensors and Actuators A: Physical - Volume 223, 1 March 2015, Pages 174-179
نویسندگان
Jan Macioszczyk, Karol Malecha, Henryk Roguszczak, Sergiusz Patela, Leszek J. Golonka,