کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7137126 | 1461883 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
100Â GHz ultra-high Q-factor photonic crystal resonators
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to â¼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 217, 15 September 2014, Pages 151-159
Journal: Sensors and Actuators A: Physical - Volume 217, 15 September 2014, Pages 151-159
نویسندگان
William J. Otter, Stephen M. Hanham, Nick M. Ridler, Giuseppe Marino, Norbert Klein, Stepan Lucyszyn,