کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7137532 | 1461895 | 2014 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A microfabricated shear sensor array on a chip with pressure gradient calibration
ترجمه فارسی عنوان
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
A micromachined floating element array sensor was designed, fabricated, and characterized. The sensor chip is 1Â cm2 and includes 16 separate sensor groups in a 4 by 4 array with a pitch of approximately 2Â mm. The device was fabricated using four layers of surface micromachining including copper and nickel electroplating. A capacitance to digital converter IC was used to measure the differential capacitance change resulting from flow forces. The achieved resolution is limited by white noise with a level of 0.24Â Pa/âHz, and linearity is demonstrated to >13Â Pa. Experimental characterization in three different duct height laminar flow cells allowed independent determination of the sensitivity to shear stress and pressure gradient. The sensor chip with half the elements acting in parallel has a sensitivity of 77.0Â aF/Pa to shear and â15.8Â aF/(Pa/mm) to pressure gradient. Pressure gradient sensitivity is found to be an important contributor to overall output, and must be accounted for when calibrating floating element shear stress sensors if accurate measurements are to be achieved. This work is the first demonstration of a shear sensor array on a chip with independent pressure gradient sensitivity calibration.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 133-142
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 133-142
نویسندگان
Zhengxin Zhao, Minchul Shin, Judith M. Gallman, Robert D. White,