کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7137539 | 1461895 | 2014 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
MEMS based normally closed silicon microregulator for gas and water
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: MEMS based normally closed silicon microregulator for gas and water MEMS based normally closed silicon microregulator for gas and water](/preview/png/7137539.png)
چکیده انگلیسی
This paper presents the design, fabrication and performance evaluation of a normally closed piezoelectrically actuated silicon microregulator. The microregulator is realized using two wafers process and is designed for the maximum operating pressure 5Â bar and it is found to be leak proof (1Â ÃÂ 10â4Â sccm of helium gas).This paper also reports the development of precision fixturing, assembling and testing of the valve. One of the potential areas for application of microregulators is in satellite propulsion using ion thrusters. Ion thrusters require feed systems with very precise propellant gas flow rate and it makes microregulator a suitable candidate. Another application of the microregulator is liquid propellant flow control in micropropulsion. The water flow measurement of the same microregulator is discussed here. The hysteresis measurement of the silicon membrane using inductive probe and the cyclic test of the microregulator are also described here.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 15-25
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 15-25
نویسندگان
B. Pramanick, S. Das, T.K. Bhattacharyya,