Ozone flexible sensors fabricated by photolithography and laser ablation processes based on ZnO nanoparticles

- Ozone flexible sensors were fabricated by photolithography and by laser ablation processes on Kapton substrate.
- The sensors were fabricated under the same conditions, and their physical, electrical and sensitive properties were studied and compared.
- ZnO nanoparticles thin film deposited by drop coating was used as sensitive material.
- Operational temperature for ozone detection at 200 °C.
- Photolithography and laser ablation samples presented a wide range of ozone detection with good reproducibility and fast response/recovery.