کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7148541 1462105 2013 53 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhancing the gas selectivity of single-crystal SnO2:Pt thin-film chemiresistor microarray by SiO2 membrane coating
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Enhancing the gas selectivity of single-crystal SnO2:Pt thin-film chemiresistor microarray by SiO2 membrane coating
چکیده انگلیسی
We consider application of SiO2 coating as a coverage membrane to differentiate local gas-sensing properties of tin dioxide thin film employed in gas-analytical single-crystal multisensor microarrays. The approach is tested utilizing homogeneous and non-homogeneous coatings. It is found out that the SiO2 coating of homogeneous thickness, of 7 nm, just reduces gas response and gas recognition ability of the microarrays which might be explained by appearance of additional defects in the SnO2 film under Ar+ bombardment assisting the SiO2 deposition. The deposition of SiO2 coating of non-homogeneous thickness, of 2-24 nm, results in substantial enhancing of gas selectivity of the developed microarrays
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 185, August 2013, Pages 59-69
نویسندگان
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