کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7149013 1462114 2013 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sensitivity improvement of free-standing porous silicon rugate filters for isopropanol vapor detection by applying lateral pressure differences
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Sensitivity improvement of free-standing porous silicon rugate filters for isopropanol vapor detection by applying lateral pressure differences
چکیده انگلیسی
To improve sensitivity, lateral pressure differences were applied to free-standing porous silicon rugate filters (FPS-RFs) for isopropanol (IPA) vapor detection. The IPA vapor concentration within pores of a 60-cycle FPS-RF used in the research was maximized at a pressure difference of approximately 177 mmH2O, and the highest sensing sensitivity was obtained at the same pressure difference as a result. The reasons for the large difference in sensitivity between the FPS-RFs and the porous silicon rugate filters (PS-RFs) formed on a silicon substrate were also discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 176, January 2013, Pages 437-442
نویسندگان
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