کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7180589 | 1467837 | 2018 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper reports a study towards enhancing the throughput of the Atomic Force Microscope (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which the workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves. The influence of the feed, the feed direction and the cutting speed on the machined depth and on the chip formation was studied in detail when machining poly(methyl methacrylate). A theoretical cutting speed over 5Â m/min could be achieved with this set-up when the frequency of the piezoelectric actuator reciprocating motions was 40Â kHz. This is significantly better than the state of the art for AFM-based nanomachining, which is currently less than 1Â m/min.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 51, January 2018, Pages 536-544
Journal: Precision Engineering - Volume 51, January 2018, Pages 536-544
نویسندگان
Yanquan Geng, Emmanuel B. Brousseau, Xuesen Zhao, Micheal Gensheimer, Christopher R. Bowen,