Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties

Size measurement methods for particles fixed on a substrate become increasingly important especially in the semiconductor industry, in addition to the conventional methods to measure particle size in the gaseous and liquid phases. In this study, size of standard nanoparticles (polystyrene latex (PSL), gold and silver) was measured using the metrological atomic force microscope (AFM) and its uncertainty was evaluated. Particle deformations were calculated based on the assumption of plastic deformation between particles and a substrate, and uncertainties derived from the particle deformation were also evaluated. Furthermore, the above-mentioned metrological AFM measurement results were compared with those obtained by other microscopies, such as SEM equipped with laser interferometer and AFM calibrated by standard samples, and were compared also with nominal values.