کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7180737 | 1467845 | 2016 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces
ترجمه فارسی عنوان
اسکن کردن میکروسکوپ تونلی بر اساس ماشین اندازه گیری برای برش الماس برش سطوح میکرو سازه شده
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کلمات کلیدی
میکروسکوپ تونلی اسکن کردن، اندازه گیری بر روی دستگاه، الماس برش برش، آرایه هرم مستطیل شکل،
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
چکیده انگلیسی
This paper presents a new on-machine measuring system based on scanning tunneling microscope principle, in order to meet the demand for precision form control of fabricated micro-structures. It is compactly established and mounted on a diamond turning machine, capable of on-machine measuring microstructures with steep slopes and size of tens of micrometers, which remains a challenge task to accomplish undistorted measurement even for general off-line metrological methods. Fly cutting with V-tip fly-cutter was first applied in two directions with interval angle of 60° to form the crossed micro V-grooves, and then efficient on-machine measurement was carried out to characterize the machined surface form without ending the proceeding of the subsequent fabrication. By depth compensation of fly cutting in 120° direction through feedback of on-machine measured results, the surface of rectangular pyramid array with diamond-shaped feature was successfully generated. Experimental results demonstrate that the proposed measuring system is of significance in the fabrication process, owing to its efficient on-machine characterization capability for generating accurate micro-structured surfaces.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 43, January 2016, Pages 308-314
Journal: Precision Engineering - Volume 43, January 2016, Pages 308-314
نویسندگان
Wu-Le Zhu, Shunyao Yang, Bing-Feng Ju, Jiacheng Jiang, Anyu Sun,