Development of a non-rigid micro-scale cutting mechanism applying a normal cutting force control system

A micro/nano-scale cutting mechanism using a non-rigid tool holder has been developed. This mechanism, which relies on a control principle that is based on a technique for nano-cutting using an atomic force microscope (AFM), can be used to fabricate grooves with a constant cutting depth on the order of a few micrometers. A linear displacement sensor is used to measure the deformation of a flexible cantilever beam to which a single-crystal diamond tool is attached. This sensor, operated in conjunction with a feedback control system and piezoelectric actuator, can maintain a constant normal cutting force during the machining process. Unlike other nano-cutting systems, this system is attached to a common machine tool that increases its machining area to a couple of square centimeters, which is required for practical applications. Several experiments were performed using this cutting mechanism to assess its performance during the cutting process, especially when the grooves are fabricated on inclined or curved surfaces without a prior knowledge of the surface geometry.