Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN-TiB2-TiSi2

Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN-TiB2-TiSi2

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials & Design - Volume 94, 15 March 2016, Pages 230-239

A.V. Pshyk, L.E. Coy, L. Yate, K. Załęski, G. Nowaczyk, A.D. Pogrebnjak, S. Jurga,