کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7222954 1470555 2018 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Improving the performance of single point diamond turning surface with ion beam figuring
ترجمه فارسی عنوان
بهبود عملکرد سطح چرخش الماس تک نقطه با تشخیص پرتو یونی
کلمات کلیدی
چرخش الماس تنها نقطه، علائم عطف شکل گیری یون پرتو، دقت سطح،
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
چکیده انگلیسی
Single point diamond turning (SPDT) can directly produce high precision optical parts, but some regularity micro structure in residual surface, and turning processing characteristics limit the surface quality to further improve. Ion beam figuring (IBF), as the last process of optical processing, can remove certain mid and high frequency errors, improve the surface performances without destroying their forms. Therefore, it is proposed to combine SPDT and IBF to manufacturing ultra-high precision surface. Two samples of diamond-turned sphere aluminum mirror were used in this experiment. One samples with surface PV and RMS 226 nm and 12.6 nm decreased to 113 nm and 7.7 nm after ion beam figuring, another sample was improved in the same degree, and the turning marks is removed with surface roughness decreased to 2.8 nm from 3 nm. The experimental results indicate that IBF can remove the turning marks and improve the surface precision in a certain range without destroying the surface form.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - Volume 172, November 2018, Pages 540-544
نویسندگان
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