کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7224251 | 1470568 | 2018 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Vanadium oxide thin films with high midwave & longwave infrared thermo-optic coefficients and high temperature coefficients of resistance
ترجمه فارسی عنوان
ضخامت های اکسید وانادیوم اکسید با ضرایب ترمو نوری مادون قرمز با طول موج بالا و طول موج بالا و ضریب مقاومت حرارت بالا
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کلمات کلیدی
وانادیوم سکسوویکسید، ضریب ترموپتیک، ضریب مقاومت دما، میکروبولومتر، بیلیس متر مادون قرمز،
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
چکیده انگلیسی
The development of thermo-optic modulator elements for midwave infrared (MWIR) and longwave infrared (LWIR) electro-optic systems, and the development of resistive thermometer elements for infrared imaging microbolometers require materials with high thermo-optic coefficients (TOC) and high temperature coefficients of resistance (TCR), respectively. In this paper, we synthesize novel vanadium oxide (VxOy) thin film structures and measure their MWIR/LWIR thermo-optic coefficients (TOCs) and their temperature coefficients of resistance (TCRs). The VxOy thin film are synthesized by sputter depositing interchanging, 5â¯nm-thick, layers of vanadium sesquioxide (V2O3) and vanadium (V) reaching a final thin film thickness of 95â¯nm. The sputter deposited multilayer structures are then ex-situ annealed in N2 and O2 atmospheres at 300â¯Â°C for 30â¯min. Infrared spectroscopic ellipsometry was used to measure the optical constants of the thin films as a function of temperature across the MWIR and LWIR bands (3000-14000â¯nm). The synthesized VxOy thin films exhibited high TOCs and high TCRs when operated in their semiconducting phase. A high TOC was measured reaching a maximum of 0.0278â¯Â°Câ1 and 0.119â¯Â°Câ1 at λâ¯=â¯4000â¯nm for N2 and O2 annealed VxOy thin films respectively; and reaching a maximum of 0.0634â¯Â°Câ1 and 0.139â¯Â°Câ1 at λâ¯=â¯10,000â¯nm for N2 and O2 annealed VxOy thin films respectively. Moreover, sheet resistance versus temperature measurements were conducted revealing room temperature sheet resistances of 1.495â¯kâ¯Î©/sq. and 1.516â¯kâ¯Î©/sq. and TCRs of â3.54%/°C and â3.46%/°C for N2 and O2 annealed VxOy thin films respectively.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - Volume 159, April 2018, Pages 79-86
Journal: Optik - Volume 159, April 2018, Pages 79-86
نویسندگان
Mohamed Ramy Abdel-Rahman,