کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
726580 1461330 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of charge injection processes including ESD in MEMS
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Analysis of charge injection processes including ESD in MEMS
چکیده انگلیسی

The effect of charge injection due to human body model (HBM) electrostatic discharge (ESD), charged device model (CDM) ESD and triboelectrification in capacitive microelectromechanical systems' (MEMS) structures is analyzed. The results show that as feature size is reduced, the effect remains constant for charging by triboelectrification. However, HBM ESD injected charge produces a change which is inversely proportional to the square of the gap separation and CDM ESD injected charge produces a change which is inversely proportional to the square of the plate area.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Electrostatics - Volume 66, Issues 11–12, November 2008, Pages 602–608
نویسندگان
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