The development of vacuum measurements down to extremely high vacuum – XHV

The available measuring devices in the ultra-high and extreme high vacuum range with their limitations are presented on the basis of the ultimate attainable pressure. New miniature gauges and calibration devices up now available are shortly reviewed. A complete bibliography is presented.

► The development of vacuum measurements down to extremely high vacuum – XHV is resumed.
► The available measuring devices in the ultra-high and extreme high vacuum range with their limitations are presented.
► New miniature gauges and calibration devices up to now available are shortly reviewed.
► A complete bibliography is presented.