A typical filter design to improve the measured signals from MEMS accelerometer

MEMS accelerometers have received attention owing to their low cost and small size. Accurate vibration measurements of both amplitude and phase, in the measurement frequency range, are important for reliable vibration analysis. However, a number of MEMS accelerometers from different manufacturers show some deviation, in amplitude and phase, when examined using controlled vibration laboratory measurements.This paper presents a method to improve MEMS accelerometers performance. Through the laboratory measurements, a characteristic function (CF) for a typical MEMS accelerometer has been calculated, with reference to a standard accelerometer. Using the CF, a filter has been designed for the MEMS accelerometer, which corrects for amplitude and phase deviation.