Development of a capacitive angular velocity sensor for the alarm and trip applications

• A capacitive angular velocity trip sensor for protection of spinning equipment was designed.
• In the critical angular speed, the angular velocity sensor was limited by pull-in instability.
• The high resolution by increasing of the width of the micro-beam was observed.

This paper reports a capacitive angular velocity trip sensor designed for protection of sensitive and accurate spinning equipment by utilizing alarm and trip. The recommended sensor can be able to measure rotating machinery angular speed and subsequently it sends alarm messages using LEDs and buzzers in the domain of an angular velocity that it can be programmable with micro-processer packages. Of course in the critical angular speed the sensor can trip the system. Moreover, the resolution of the trip sensor is determined and it is shown that with increasing of the width of the micro-beam high trip resolution is observed.