Small-pixel TFT flaw detection and measurement using voltage imaging technique

• A good solution for small-pixel TFT flaw detection.
• A measurement with advantages of in-process and no contact damaged to TFT array panels.
• An inspection provides better small-pixel point flaw detection capability.
• A suitable way to detect a small-pixel defect using voltage imaging technique.

The paper proposed the characteristics of flaw measurement in small-pixel design mobile displays based on TFT array panel with respect to electrical-optic characterization. For advanced small-pixel and high-resolution mobile display applications, the display pixels on array process are smaller, detecting small-pixel defect played an important role than previously seen in non-small-pixel TFT array panels for managing process yield. The study resulted in small-pixel size TFT array show the flaw detection performance and preference approaches using the voltage imaging technique. It provides an initial insight into the high-resolution of small-pixel size designs for advanced mobile displays application.