Investigations into the use of single-crystalline silicon as mechanical spring in load cells

This article presents the results of an investigation into the use of single-crystalline silicon as mechanical spring in load cells. As a result of the crystalline structure, a very high reproducibility of the material properties is expected. In addition, the mechanical aftereffects of single-crystalline silicon are by the factor of 100 smaller than in metallic materials [D. Baumgarten, Bestimmung der elastischen Nachwirkung von Metallischen und Nichtmetallischen Federwerkstoffen im Kriechversuch, Dissertation, Braunschweig, 1989]. Performed simulations using the finite element method consider anisotropic and brittle material behaviour. It is shown that on principle silicon in combination with sputtered metal strain gauges can be used as mechanical spring material for load cells and force sensors.