The characterization of new VGMS (vacuum gauge metrology system) by the traceability of multi stage static expansion system

In this study, the design and characterization of vacuum gauge calibration system which was upgraded is described. A capacitance diaphragm manometer is used to characterize the system performance. 1 Torr and 10 Torr CDGs are available to compare the performance of VGMS system which is traceable to the static expansion system generating calibration pressures in the range of 9 × 10−4 Pa up to 1 × 103 Pa. The working pressure range of VGMS system is 1 × 10−4–1.3 × 105 Pa. It is used a comparison method as a calibration process. After making the system description and process, the results of calibrations included uncertainty values are given to determine long term instability and show the performance of the system.

► In this study, we describe the characterization of vacuum gauge calibration system.
► The stable, uniform and constant pressure is very important to get accurate results.
► The automatization of calibration system provides more efficient calibration service.
► The stability of reference pressure value depends on calibration chamber design.
► We determined the long term instabilities for 1 and 10 Torr CDGs.