Design and modeling of sensor behavior for improving sensitivity and performance

• Design for sensors make a small circuit containing the electromagnetic component, etc.
• Signal conditioning circuits are agreed on the simulation result and 3-D modeling.
• Novel sensor allows the interaction between signal conditioning circuits and simulation results.
• Design process of circuit characteristics/parameters, i.e., mechanical and electrical variation.
• Theoretical signal conditioning analyses are investigated for improving performance.

This paper describes the design process of the MEMS-based pressure sensor and analysis of circuit characteristics and parameters such as mechanical and electrical variation. Using the industry standard electrical and mechanical tools for design and analysis, in short duration low cost mechatronics equipment with improved accuracy and performance can be achieved. In this paper, piezoresistive material characteristics and theoretical signal conditioning analyses are also investigated for improving its performance. A newly proposed design technology for MEMS-based pressure sensors make a small circuit containing the electromagnetic component, transformer and analyzed for the said purpose.