کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
731221 | 1461528 | 2015 | 10 صفحه PDF | دانلود رایگان |
• Porous structures were introduced to ZnO by using a thermally oxidized PS.
• The sensitivity of the ZnO/oxidized PS was 83.4% for 22 ppm of ethanol gases.
• High porosity, and abundant oxygen vacancies enhanced the sensing.
• The sensor showed favorable selectivity for ethanol over acetone.
ZnO nanostructures were grown on thermally oxidized porous silicon (PS) substrates by RF-magnetron sputtering for volatile organic compounds (VOCs) sensing applications. PS was fabricated by electrochemical anodization of n-type crystalline silicon in an ethanoic hydrofluoric acid solution to produce a PS surface. X-ray diffraction (XRD) analysis confirmed that the ZnO nanostructure highly preferred an (0 0 2) phase orientation. The sensitivities of the ZnO/oxidized PS sensor investigated for 22 ppm of acetone, ethanol, iso-propanol, and toluene vapor at the optimum operating temperature of 250 °C were 79.6%, 83.4%, 69.3%, and 69%, respectively. The ZnO/oxidized PS sensor can be detect VOC vapor up to 2 ppm.
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Journal: Measurement - Volume 59, January 2015, Pages 248–257