Exploration of transmission efficiency and quantitative measurement of the Axis Ultra electron spectrometer

The estimation of transmission efficiency was done on an Axis Ultra electron spectrometer according to the parameters presented in the literatures. At the same time, Ag, Au, and Cu were measured as standard sample to check the real transmission efficiency. Compared the measured intensities with the estimated ones, it was found that the X-ray flux of dual anode Mg Kα on the samples should be much more than 6.0 × 1011 photons mm−2 s−1, which was different from the data given in the literature. Transmission function correction was also done and the quantification results were tested with stoichiometric samples of NaCl and KI after the transmission function correction, and the results agree well with the essentially stoichiometric relation. The analytical approach and procedure can provide valuable reference for the quantification analysis and correction of conventional electron spectrometer.