Atomic force microscope probe calibration by use of a commercial precision balance

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of 0–1.6 μN by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), but the force vs. deflection is not as linear as the force vs. sensor output curve. The force constant of the cantilever was measured to 0.26 N/m with a standard deviation of 0.01 N/m. It shows that there is big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer’s specifications.