A three-axis vibration isolation system using modified zero-power controller with parallel mechanism technique

This paper proposes a module-type three-degree-of-freedom vibration isolation system using modified zero-power control. Three vibration isolation modules are connected together using parallel mechanism to control 3-DOF motions. Each module consists of a common base, an individual middle mass and a common isolation table. The base to the middle mass is suspended by positive springs generated by active and passive system, and the middle mass and the isolation table is connected by negative spring realized by active-type modified zero-power control. The developed system could realize zero-compliance to direct disturbances as well as good ground vibration isolation. Furthermore, the isolation table is supported by a weight support mechanism for supporting heavy payloads. In the previous research, a concentrated middle mass with redundant actuators, in the vertical and horizontal directions, were used. Therefore, a vibration isolation system is proposed in this work using modular concept to overcome those drawbacks. Each module is controlled separately by decentralized control technique, and three modules can be used for three-degree-of-freedom of motion control. Therefore, no redundancy of actuator is occurred. Moreover, an improved zero-power controller is presented that can adjust negative stiffness instead of conventional zero-power controller. The results obtained from analytical and experimental studies show that the modular technique is reliable and efficient approach to vibration control, and represents a suitable alternative to the conventional active vibration isolation systems.

► We propose a modular 3-DOF vibration isolator using modified zero-power control.
► Modified zero-power controller can adjust negative stiffness.
► Each module has a common base, a separate middle mass and a common isolation table.
► Module-type vibration isolator has no redundant actuator.
► Modular concept is a suitable alternative to the conventional vibration isolator.