Characterization of the polyurea polymeric waveguides fabricated using the chemical vapor deposition process

Aromatic polyurea-based waveguides were fabricated by the evaporation and deposition of a diamino monomer and a diisocyanate monomer onto an indium tin oxide (ITO) glass substrate in a vacuum chamber. The nonlinear I–V behaviors of the polyurea film were characterized in situ during poling. Fourier transform infrared spectroscopy and the heterodyne Mach–Zehnder interference (HMZI) technique were applied to explore the electro-optic performance of the polyurea polymeric waveguide induced by an applied electric field. The Pockels coefficients were measured by a heterodyne Mach–Zehnder interference (HMZI) system to be γ13=7.1 and γ33=21.9 pm/V, for the TE and TM polarizations, respectively.