کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
733867 893374 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A comparative study of the influence of different post-treatment methods on the properties of HfO2 single layers
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
A comparative study of the influence of different post-treatment methods on the properties of HfO2 single layers
چکیده انگلیسی

Heat treatment, laser conditioning and ion post-treatment were used, respectively, on HfO2 single layers deposited by electron beam evaporation (EBE). Optical, structural and laser-induced damage threshold (LIDT) properties of the films had been studied. It was found that all of the post-treatment methods are effective for improving the LIDT, but the mechanism for the improvement differs. Heat treatment in atmosphere was found to be effective for improving film stoichiometry. Laser conditioning was useful to decrease the defects by stress release. While in the ion post-treatment, the defects were removed by ion sputtering and the absorption was reduced at the effect of compression induced by ion bombardment. The most suitable method should be chosen for the required characteristics of the coatings.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics & Laser Technology - Volume 41, Issue 5, July 2009, Pages 570–573
نویسندگان
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