کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
734686 | 893467 | 2008 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Investigation on properties of TiO2 thin films deposited at different oxygen pressures Investigation on properties of TiO2 thin films deposited at different oxygen pressures](/preview/png/734686.png)
TiO2 thin films were prepared by electron beam evaporation at different oxygen partial pressures. The influences of oxygen partial pressure on optical, mechanical and structural properties of TiO2 thin films were studied. The results showed that with the increase of oxygen partial pressure, the optical transmittance gradually increased, the transmittance edge gradually shifted to short wavelength, and the corresponding refractive index decreased. The residual stresses of all samples were tensile, and the value increased as oxygen partial pressure increasing, which corresponded to the evolutions of the packing densities. The structures of TiO2 thin films all were amorphous because deposition particles did not possess enough energy to crystallize.
Journal: Optics & Laser Technology - Volume 40, Issue 3, April 2008, Pages 550–554