Rapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometry

An improved phase modulated technique has been implemented to increase the speed and accuracy of optical parameters extraction for a uniaxial bulk media. In combination of the genetic algorithm, we show that not only the complex refractive indices, the inclination and azimuth angles of optical axis can also be extracted. Furthermore, by using a two-probe-beam configuration, the speed of convergence can be improved by 5-times. Such a high speed and accurate method can be applied for the in-situ measurement of dynamic materials.

► All optical parameters of the uniaxial medium are rapidly and accurately determined.
► The genetic algorithm has been implemented in the ellipsometric measurement.
► The parametric equations for fitting range have been obtained.
► The appropriate incident angle pair has been suggested.