کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
736424 | 893862 | 2011 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A Gaussian-shaped AT-cut quartz crystal resonator
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 166, Issue 2, April 2011, Pages 173–176
Journal: Sensors and Actuators A: Physical - Volume 166, Issue 2, April 2011, Pages 173–176
نویسندگان
Takashi Abe, Hiroki Kishi,