Keywords: سه; Supercapacitor; Silicon nanorod array; TiN nano film; DRIE; ALD
مقالات ISI سه (ترجمه نشده)
مقالات زیر هنوز به فارسی ترجمه نشده اند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
Keywords: سه; PZR; piezoresistive; CAP; capacitive; SOI; silicon on insulator; DRIE; deep reactive ion etching; NW; nanowire; Pressure transducers; Minimally invasive; Cardiovascular sensing; Micromachining; Miniaturization; Downscaling;
Keywords: سه; DRIE; Bosch process; Cryogenic process; High aspect ratio; Sub-micrometer; MEMS
Keywords: سه; DRIE; Ultra-deep silicon cavities; Etch-stop material; KOH; ARDE
Keywords: سه; MEMS; Neural probes; Flexible probes; Cortical electrophysiology; BMI; brain-machine interface; NC; nanocomposite; DRIE; deep reactive ion etching;
DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
Keywords: سه; Silicon; Plasma etching; DRIE; Bosch; DREM process; Infinite selectivity; Erosion-free; High aspect ratio; RIE lag; Profile control; Scallop;
Smoothening of scalloped DRIE trench walls
Keywords: سه; DRIE; Scalloping; DRIE Trench walls; Smoothening of DRIE trenches; Oxidation;
Effect of Si nanostructures on PEDOT:PSS Si hybrid solar cells
Keywords: سه; Hybrid solar cell; Nanoimprint; Metal assisted chemical etching; Micro(nano) pattern; HT-LPS; high-temperature liquid-phase synthesis; FESEM; field-emission scanning electron microscope; VLS; vapor-liquid-solid; PEDOT:PSS; poly(3,4-ethylenedioxythiophene)
Wafer level silicon mould fabrication and imprinting of high density microstructures
Keywords: سه; Silicon mould; DRIE; Photolithography; Thermal imprinting; High density microstructures; Glass
Sensitivity tuning of A 3-axial piezoresistive force sensor
Keywords: سه; Piezoresistivity; 3D-force sensor; DRIE; FEM simulations;
A buried vertical filter for micro and nanoparticle filtration
Keywords: سه; DFR; dry film photo-resist; DI; de-ionized (demineralized); DRIE; deep reactive ion etching; LPCVD; low pressure chemical vapor deposition; PECVD; plasma enhanced chemical vapor deposition; SEM; scanning electron microscope; Silicon micromachining; Partic
Micro arc welding for electrode gap reduction of high aspect ratio microstructures
Keywords: سه; DRIE; HARMS; Gap reduction; Micro welding
A dicing free SOI process for MEMS devices
Keywords: سه; DRIE; HF VPE; Dry release; Dicing free; MEMS; Microfabrication; Accelerometer
Sharp silicon tips with different aspect ratios in wet etching/DRIE and surfactant-modified TMAH etching
Keywords: سه; Silicon tips; Anisotropic etching; Surfactant; DRIE
PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)
Keywords: سه; PMN–PT; Lead magnesium niobate–lead titanate; xPb(Mg1/3Nb2/3)O3-(1 − x)PbTiO3; Piezoelectric single-crystal; Etching; KrF excimer; Exciplex; Laser ablation; Dry etching; Reactive ion etching; DRIE; Inductively coupled plasma; ICP
A Gaussian-shaped AT-cut quartz crystal resonator
Keywords: سه; Quartz crystal resonator; DRIE; 3D; Etch selectivity; QCM
DRIE based technology for 3D silicon barcodes fabrication
Keywords: سه; Silicon; DRIE; Barcodes; Cell biology
Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget
Keywords: سه; TMAP; DRIE; Nanowire; Stacked; 3D; Array
Skin penetration and fracture strength testing of silicon dioxide microneedles
Keywords: سه; Bio-MEMS; DRIE; Microneedles; Lab-on-a-chip
Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature
Keywords: سه; KOH; TMAH; Scalloping; DRIE; STiGer process; Cryogenic etching
A systematic study of DRIE process for high aspect ratio microstructuring
Keywords: سه; Silicon etching; MEMS; DRIE; HARMS; micro-machining; Parameter ramping
A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications
Keywords: سه; MOEMS; X–Y micro-stage; Microlens scanner; Comb-drive actuator; SOI; DRIE
A high resolution MEMS based gas chromatography column for the analysis of benzene and toluene gaseous mixtures
Keywords: سه; Gas chromatography column; High resolution; MEMS; DRIE
Design, process and characterisation of a high-performance vibration sensor for wireless condition monitoring
Keywords: سه; Vibration sensor design; DRIE; Wireless sensor network; BCB; Wafer bonding
Integration of silicon micro-hole arrays as a gas diffusion layer in a micro-fuel cell
Keywords: سه; Si-MHA; GDL; MEMS; DRIE;
Process effects of double step DRIE and Ni–Co electroplating for a trench-type cantilever probe for a fine-pitched MEMS probe card
Keywords: سه; MEMS probe card; DRIE; Nickel–cobalt electroplating; Seed layer
Design, fabrication, and testing of microporous wicking structure
Keywords: سه; Wicking; MEMS; DRIE; Capillary flow
Comparison of microchannel dimensions for air-breathing polymer exchange membrane microfuel cells
Keywords: سه; DRIE; Microchannels; PEM fuel cell; Flow field pattern
Development of fabrication process for integrated micro-optical elements on Si substrate
Keywords: سه; Micro-lens; DRIE; Oxidation; Si substrate
Novel monocrystalline silicon micromirrors for maskless lithography
Keywords: سه; Micromirrors; Maskless Lithography; Transfer bonding; Electrostatic actuation; EUV lithography; DRIE;
An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon
Keywords: سه; DRIE; Bosch process; Anisotropic etching; Passivation layer
Sidewall roughness characterization and comparison between silicon and SU-8 microcomponents
Keywords: سه; Surface roughness; DRIE; SU-8 fabrication; UTSP
Deep reactive ion etching and focused ion beam combination for nanotip fabrication
Keywords: سه; Silicon tips; FIB; DRIE
Micromachined Fourier transform spectrometer on silicon optical bench platform
Keywords: سه; Fourier transform spectroscopy; DRIE; KOH; Lateral combdrive actuator; Optical MEMS
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
Keywords: سه; Micromachining; DRIE; HARMS; Sub-micron; 3D; Silicon;
High-power optical microswitch based on direct fiber actuation
Keywords: سه; MOEMS; DRIE; Thermal actuator; High-power; Optical switch;
Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
Keywords: سه; Gray-scale lithography; DRIE; MEMS; Etch selectivity;
Compensated aspect ratio dependent etching (CARDE) using gray-scale technology
Keywords: سه; DRIE; Aspect ratio dependent etching; Gray-scale lithography; 3D structures; Phase fresnel lens;
A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches
Keywords: سه; SPDT circuit; RF MEMS; Lateral contact switch; DRIE;
Substrate interconnect technologies for 3-D MEMS packaging
Keywords: سه; DRIE; Gray-scale lithography; 3-D substrate; Interconnects;
Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications
Keywords: سه; Optical MEMS; Micromirrors; Optical switches; DRIE;