کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
737669 1461912 2012 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Micro arc welding for electrode gap reduction of high aspect ratio microstructures
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Micro arc welding for electrode gap reduction of high aspect ratio microstructures
چکیده انگلیسی

This paper presents a novel post-process gap reduction technique for high aspect ratio microstructures. The gap reduction procedure is based on electrostatic deflection of a movable microstructure and micro welding for permanently locking the final position. The gap reduction technique is demonstrated for MEMS devices fabricated by the air gap insulated microstructures technology. The functional principle of the gap reduction mechanism, the fabrication technology and the experimental set-up is presented. As a result, the initial gap width between vertical comb electrodes was decreased from 4500 nm to 385 nm, leading to a final aspect ratio of 150.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 188, December 2012, Pages 495–502
نویسندگان
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