Resonant bending sensor based on sputtered Galfenol

Sputtered magnetostrictive Galfenol acts as sensing layer in a bending sensor based on a passive oscillating circuit. The change of the permeability is detected via a planar rectangular Cu inductor on top of the sensor. A Cu thin film beneath the Galfenol with Ti as adhesive promoter supports the growth of a (1 1 0) fiber texture which improves the permeability change.