Determining the Young's modulus and creep effects in three different photo definable epoxies for MEMS applications

In this study, a fundamental measurement of the Young's modulus of Epoclad and Epocore negative photo resist is performed, using a miniature tensile test setup. The experiments were done on miniature dog bone tensile test structures which are fabricated using normal micro machining methods. In addition, the creep behavior and the maximum stress and strain at the point of fracture of the resists is recorded. The two resists reveal a mechanical behavior very similar to the well-reported resist SU-8. SU-8 is also tested using the same tools for comparison.