Dynamical switching of an electromagnetically driven compliant bistable mechanism

Dynamical switching behaviors of a compliant bistable mechanism driven by electromagnetic force are investigated. The bistability of the mechanism originates from combined tension and bending of the beam structures. Finite element analyses are used to characterize the bistability of the mechanism under static loading. An analytical model is developed to analyze the dynamic behaviors of the mechanism. The main advantage of this dynamic actuation method is the absence of on-chip driving mechanisms. The dynamical switching characteristics of the bistable mechanism are examined. Microscale prototypes are fabricated and tested. Using the driving technique, we demonstrate dynamical switching in the fabricated device and verify that the performance predicted by theory is attained.