کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
737649 1461912 2012 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications
چکیده انگلیسی

In this paper, we have developed an electrothermally driven RF MEMS capacitive switch, where the HfO2 film, deposited by atomic layer deposition (ALD) process, was used as insulation dielectric between signal line and ground line. Thanks to high permittivity and excellent electrical and thermal isolation properties of the HfO2 film, as well as high driving force of the electrothermal actuator, the isolation of the proposed switch coated with the HfO2 film was up to 60 dB at 35 GHz and the bandwidth of isolation better than 25 dB was 10.5 GHz. The results demonstrate that the HfO2 film is a good candidate material serving as sidewall dielectric to realize the lateral capacitive switch with high RF performances.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 188, December 2012, Pages 342–348
نویسندگان
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