Keywords: GHz; High-frequency; RF MEMS; Metamaterial; Gap waveguide; Carbon nanotubes
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Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch
Keywords: RF MEMS; Pull-in-Voltage; Bridge; S-Parameter; FOM; Static analysis; Switch;
Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film
Keywords: RF MEMS; Solidly mounted resonator; Piezoelectric film;
Modeling and analysis of capacitance in consideration of the deformation in RF MEMS shunt switch
Keywords: Microelectromechanical systems; Modeling; Capacitance; Capacitive shunt switch; RF MEMS;
Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation
Keywords: Actuation; Capacitive switch; Up-state capacitance; RF MEMS;
Utility of RF MEMS miniature switched capacitors in phase shifting applications
Keywords: Miniaturization; Phase shifters; Phased Array; RF MEMS; Switched capacitors;
Novel analytical model for optimizing the pull-in voltage in a flexured MEMS switch incorporating beam perforation effect
Keywords: Pull-in voltage; Non-uniform meander; Ligament efficiency; Perforated switch; RF MEMS; Optimization; Evolutionary algorithms; Dragonfly algorithm;
Tunable low-pass Ka-band MEMS filter based on Electromagnetic-Bandgap Structure
Keywords: Tunable filter; RF MEMS; Electromagnetic-Bandgap Structure;
Development of compact 180° phase shifters based on MEMS technology
Keywords: Compactness; Hilbert curve; Peano curve; Phase shifter; RF MEMS; SU-8;
High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications
Keywords: Through silicon vias; RF MEMS; Integrated passive devices; Reliability; Failure analysis; Non-destructive physical analysis; X-ray microscopy; High-resolution X-ray computed tomography;
A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage
Keywords: RF MEMS; Stiffness; Variable capacitor; Auxiliary beam
Realization and characterization of surface micromachined tunable band stop CSRR filter using MEMS bridges on silicon substrate
Keywords: CSRR filter; RF MEMS; Micromachining; Fabrication process; Characterization
A modified capacitance model of RF MEMS shunt switch incorporating fringing field effects of perforated beam
Keywords: Up-state capacitance; Down-state capacitance; Fringing field capacitance; Ligament efficiency; Perforated switch; RF MEMS
Tunable low-pass MEMS filter using defected ground structures (DGS)
Keywords: Tunable filter; CPW; DGS; RF MEMS
Ku-band RF MEMS tunable comb line band reject filter on coplanar transmission line
Keywords: Comb line band reject filter; RF MEMS; Device structure; Equivalent model; RF characterization; Mechanical and electromechanical characterization
Small size and low loss resonator type DMTL phase shifter
Keywords: RF MEMS; Phase shifter; Bonding wire; Resonator
A three-channel thermoelectric RF MEMS power sensor for GaAs MMIC applications
Keywords: Power sensor; RF MEMS; Three-channel; Isolation; GaAs MMIC applications
GaAs MMIC fabrication for the RF MEMS power sensor with both detection and non-detection states
Keywords: Power sensor; RF MEMS; GaAs MMIC fabrication; Protection; Signal-to-noise ratio (SNR)
High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications
Keywords: Lateral switch; Electrothermal-actuation; RF MEMS; Capacitive switch; ALD process
Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates
Keywords: FBAR; Flexible electronics; LCP; RF MEMS
Low power digital TTL command for 1 bit 60 GHz RF MEMS phase shifter
Keywords: RF MEMS; MEMS; Boost converter; Phase shifter; Smart antenna
Effect of the substrate on RF power-handling capability of micro-electromechanical capacitive switches
Keywords: RF MEMS; Power handling; Capacitive switch; Multiphysics analysis;
A GaAs MMIC-based coupling RF MEMS power sensor with both detection and non-detection states
Keywords: Power sensor; RF MEMS; GaAs MMIC; Shunt capacitive switch; Detection and non-detection states
Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches
Keywords: Aleatory uncertainty; Epistemic uncertainty; Quantification of margins and uncertainties; Uncertainty analysis; Microsystems; RF MEMS; Squeeze-film damping
A coupling RF MEMS power sensor based on GaAs MMIC technology
Keywords: Microwave power measurement; MMIC; RF MEMS; Intermodulation distortion
Tunable band-stop filter based on single RF MEMS capacitive shunt switch with meander arm inductance
Keywords: Band-stop filter; RF MEMS; Tunable filter; Zipping effect; Meandering inductor
Hybrid connection of RF MEMS and SMT components in an impedance tuner
Keywords: RF MEMS; Impedance tuner; Switch; SMT; Hybrid
Tunable dual-frequency RF MEMS rectangular slot ring antenna
Keywords: RF MEMS; Micromachined antennas; Reconfigurable antennas; Slot ring antennas
Amorphous SiC as a structural layer in microbridge-based RF MEMS switches for use in software-defined radio
Keywords: PECVD silicon carbide; RF MEMS; Microbridge; Young’s modulus; Residual stress
Low-loss microwave interconnections by using polymeric based coplanar waveguides on low resistivity silicon substrates
Keywords: Coplanar transmission lines; Polymers; RF MEMS; Micromachining; Photolithography
Tuning of resist slope with hard-baking parameters and release methods of extra hard photoresist for RF MEMS switches
Keywords: RF MEMS; Resist angle; Hard-baking parameters; Thermal cross-linking; Resist skin; Plasma stripping
An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors
Keywords: RF MEMS; Capacitive switch; Variable capacitor; Intelligent bipolar actuation; Stiction; Dielectric charging; Pull-out voltage
Surface micromachined RF MEMS variable capacitor
Keywords: Variable capacitor; Pull-in voltage; RF MEMS; Quality factor
Waveform design for pulse-and-hold electrostatic actuation in MEMS
Keywords: RF MEMS; Electrostatic actuation; Switch bounce; Input shaping
Micromachined tunable filter using fractal electromagnetic bandgap (EBG) structures
Keywords: RF MEMS; Capacitive switch; Coplanar waveguide (CPW); Fractal EBG; Bandstop filter
Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS
Keywords: Piezoelectric resonators; Two-port resonators; RF MEMS; Contour-mode; Aluminum nitride
Piezoelectric aluminum nitride MEMS annular dual contour mode filter
Keywords: RF MEMS; Contour mode; Aluminum nitride; Piezoelectric resonator; Bandpass filter; Dual mode resonator
Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever
Keywords: RF MEMS; RF switch; Piezoelectric actuator; Low voltage operation; PZT
Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys
Keywords: Atomic layer deposition; Capacitive shunt switch; Dielectric layer; rf MEMS
One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
Keywords: RF MEMS; Piezoelectric resonator; Contour-mode resonators; Aluminum nitride
High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters
Keywords: RF MEMS; MEMS resonators; Tunable MEMS filters; Ladder filters; Dielectric transduction; Radio frequency filters; Bandpass filters; Channel-select filters; Thickness shear mode resonators
Fabrication and performance of a micromachined 3-D solenoid inductor
Keywords: Solenoid inductor; RF MEMS; Quality factor; 3-D
Development of a large-force low-loss metal-contact RF MEMS switch
Keywords: RF MEMS; Switch; Non-linear spring system; Restoration force; Micro-machining
Amorphous metal alloy based MEMS for RF applications
Keywords: Amorphous metal alloys; Mo–Si–N; Variable capacitor; RF MEMS
Micromachined DC contact capacitive switch on low-resistivity silicon substrate
Keywords: DC contact switch; Capacitive shunt switch; CPW transmission line; RF MEMS;
A simple lumped electrical model for an RF MEMS switch considering lossy substrate effects
Keywords: RF MEMS; Switches; Radio frequency; Micromachining; Substrate effects; Quality factor; Electrical model; Equivalent circuit;
Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation
Keywords: RF MEMS; Capacitive switch; High dielectric constant; Hafnium oxide; PZT;
Modeling and design of composite free-free beam piezoelectric resonators
Keywords: Piezoelectric microresonator; Free-free beam; Q-optimization; RF MEMS;
Improvement of isolation for MEMS capacitive switch via membrane planarization
Keywords: RF MEMS; Capacitance switch; Coplanar waveguide (CPW);
High isolation X-band MEMS capacitive switches
Keywords: MEMS capacitive switch; RF MEMS; Bulk micromachining;