کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699750 | 1461937 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A simple lumped electrical model for an RF MEMS switch considering lossy substrate effects
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A simple lumped electrical model for an RF MEMS switch considering lossy substrate effects A simple lumped electrical model for an RF MEMS switch considering lossy substrate effects](/preview/png/9699750.png)
چکیده انگلیسی
This work focuses on electrostatically actuated micro-electro-mechanical systems (MEMS) capacitive switches, intended for adaptive output stage of power amplifiers. These devices are particularly attractive because theoretically they are capable of very high quality factor values due to the air gap between plates and the low resistivity of lines and bridge. On the other hand, substrate parasitic effects, overlooked up to date, can seriously impair device performance. In this paper, we introduce a lumped element equivalent circuit taking into account substrate effects. Model validation is based on measurements carried out in the 50Â MHz-40Â GHz range.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 515-521
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 515-521
نویسندگان
Giuseppe Cusmai, Marco Mazzini, Paolo Rossi, Chantal Combi, Benedetto Vigna, Francesco Svelto,