A novel haptic platform for real time bilateral biomanipulation with a MEMS sensor for triaxial force feedback

A novel triaxial force sensing device developed by the authors with a MEMS sensor as core component is mounted on a subnanometric resolution nanomanipulator having three degrees of freedom (DOF). This sensorized device allows measuring forces on the nanomanipulator tip in the range of 0–3 N for normal and ±50 mN for tangential forces with a resolution of 11 bits. Together with a haptic input device, a setup was created allowing palpation and force feeling. The mathematical model used to drive the master haptic interface force feedback capabilities is based on online force and stiffness measurement. The performance of the novel setup is demonstrated with a cell palpation experiment.