Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design

This paper presents a design guideline for a piezoelectric actuated check valve diaphragm micropump for microfluidic applications. Diaphragm average displacement was adopted in analyzing a piezoelectrically actuated diaphragm. For the first time, the relationship between the stroke volume and backpressure of a check valve diaphragm micropump were simulated with a Finite Element Analysis (FEA) tool. The simulated results reasonably agreed to the experimental results of the micropump.