کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738424 | 894007 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology](/preview/png/738424.png)
چکیده انگلیسی
This study is aimed at outlining the fabrication of a novel piezoresistive force sensor using LTCC technology, which operates at millinewton range, yet is compatible with low cost thick-film fabrication process. Mechanical and electrical characterization of the device is explained in terms of processing conditions, including the principle of force sensing and materials employed. The improvement of device functionality by modifying commercially-available thick-film conductors is described. The sensors are found to be efficient in responding to forces below 100 mN.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 2, 15 March 2007, Pages 334–338
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 2, 15 March 2007, Pages 334–338
نویسندگان
Hansu Birol, Thomas Maeder, Ingo Nadzeyka, Marc Boers, Peter Ryser,