Process window of micromachined gyroscopes subjected to vibrational frequencies

A micromachined gyroscope (or gyro) is used to measure angular velocities for many applications such as automotive, robotics, navigation, military and consumer electronics applications. For our specific automotive applications, the gyro is used to sense the yaw, roll, and pitch angular rates for ride stabilization and rollover detection. The process window is very important to the goal of achieving high volume mass production and cost reduction of the devices. The purpose of this study is to perform modal analyses, validate the simulation results with testing data, and provide a design tool for quick gyro element resonant frequency predictions. Then the process window and design limit can be quickly evaluated and optimized before the final wafers are built.