کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738720 | 1461932 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Micromachined X-ray collector for space astronomy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A novel micromachined X-ray collector using anisotropically etched Si(1 1 1) side walls as X-ray mirrors for future astronomical missions is reported. The collector was designed to converge a Ï 100 mm parallel X-ray beam into a Ï 4 mm focus. In order to obtain smooth Si(1 1 1) side walls, dynashock-type ultrasonic waves were added during the anisotropic KOH etching. The surface roughness on the order of nm or less was achieved. The sidewalls or the X-ray mirrors were diced from the wafer as mirror chips and then adhered to a mount formed by deep reactive ion etching. The first light image was successfully obtained at Al Kα 1.49 keV in a ISAS 30 m-long X-ray beam line.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 145â146, JulyâAugust 2008, Pages 201-206
Journal: Sensors and Actuators A: Physical - Volumes 145â146, JulyâAugust 2008, Pages 201-206
نویسندگان
Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Yoshitomo Maeda, Kazuhisa Mitsuda, Takeyuki Osawa, Masaki Suzuki, Akio Hoshino, Yoshitaka Ishisaki, Takayuki Takano, Ryutaro Maeda,