Humidity sensitivity of MnTiO3 film prepared via chemical solution deposition process

A pyrophanite MnTiO3 film was prepared with chemical solution deposition process. The DSC pattern of the dried precursor showed only an exothermic peak at 575.6 °C. The XRD analysis revealed that a single phase pyrophanite MnTiO3 film was obtained by preheating the precursor at 400 °C for 1 h, followed by calcining at 700 °C for 3 h. The humidity sensitivity of the film was tested by measuring the dc electric resistance of the film at different relative humidity (RH) level. A decrease of resistance with increase in humidity was observed. A 4500% change in resistance was registered over the range 11.3–95% RH. Response times were about 60–95 s for humidity change between two relative humidities of 11.3% and 95% RH. Mechanism of humidity sensing of the MnTiO3 films was discussed.